Our Flagship Product: MIRA
MIRA - Large Chamber Scanning Electron Microscope
MIRA represents a breakthrough in electron microscopy, featuring an exceptionally large vacuum chamber that enables non-destructive analysis of complete components and large specimens.
This revolutionary design allows for in-situ testing and avoids destructive sample preparation, preserving valuable components while delivering advanced analytical capabilities across various industries.
Unmatched Sample Size
Accommodates samples up to 1500mm in diameter and 1500mm in height, enabling analysis of large components.
High Resolution Imaging
Advanced electron optics deliver better than 10nm resolution for detailed analysis of microstructures.
Versatile Analysis
Integrates EDS, EBSD, and optionally FIB & FT-IR for comprehensive material characterization.
MIRA Technical Specifications
| Feature | Specification |
|---|---|
| Resolution | Better than 10nm |
| Magnification | 10x - 300,000x |
| Acceleration Voltage | 0.2 - 30keV |
| Detectors | Channeltron (SE), 4-Quadrant (BSE) |
| Maximum Specimen Size | Up to 1500 mm diameter, 1500 mm height |
| Maximum Specimen Mass | 300 kg |
| Axes | 5+1 axis system with micro-step control |
| Repetition Accuracy | ±50 μm |
| Positioning Range (X) | 600mm, 1000mm, 1500mm options |
| Positioning Range (Z) | 600mm, 1000mm, 1500mm options |
| Positioning Range (A) | 90° |
| Positioning Range (B) | 135° |
| Positioning Range (C) | 360° |
| Positioning Range (D) | 350° |
| Standard Analytical | EDS (Energy Dispersive X-Ray Spectroscopy), EBSD (Electron Backscatter Diffraction) |
| Optional Capabilities | FIB (Focus Ion Beam), FT-IR (Fourier Transformed Infrared Spectrometer), Internal Camera System |
| Software | MIRA Control System (Windows® based) |
| Hardware | PC, monitors, Printer |
| Low Vacuum Pumps | Rotary vane (65m³/h), Rotary lobe (400 m³/h) |
| High Vacuum Pump | Turbo pump 2400 l/sec |
| Ultimate Vacuum | Up to 10⁻⁶ mbar (achieved after ~45 minutes) |
| Vacuum Chamber Size Options | 3m³, 9m³, 12m³ |
